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Cleanroom 1

N2FC Cleanroom 1 (CR1) is one of the university’s cleanroom in Singapore equipped with a state-of-the-art clean room facility with 673 m2 of Class 100 landscapes area in total​.

The architecture layout of the clean room adopts the open space concept with two storeys of Cleanroom level and Subfab level whereby the latter one is located below the former counterpart. Cleanroom level is designed to house different process modules including Lithography ModuleWet Bench ModuleDry Etching ModuleDiffusion and Ion Implantation ModuleThin Film Module and Metrology Module with various respective semiconductor equipment. Whereas for Sub-fab level, it is designed to house all the supporting facilities for the aforementioned cleanroom level equipment as well as Packaging and Dicing module.

Apparently, the major active research activities in CR1 involve silicon based microelectronics, nanoelectronics, silicon photonics areas as well as microelectromechanical (MEMS) area.​
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