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Cleanroom 2

With state-of-the-art nano-fabrication facilities, the Nanyang NanoFabrication Center (N2FC) provides university wide support for nano-science and nanotechnology research and education.

 
Cleanroom 2 (CR2) is a class 10 and class 100 cleanroom with an area of 693 m2 dedicated for the fabrication of non-Si based micro- and nano-devices.

 
CR2 hosts a range of advanced fabrication equipment such as Metal Organic Chemical Vapor Deposition (MOCVD), Electron Beam Lithography (EBL) and other tools for micro- and nano-fabrication. This allows integration of new nano-devices and technologies for advanced ICs and systems.
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